We demonstrate the formation of a complementary metal-oxide semiconductor (CMOS) compatible micro scale pH sensor with an antimony (Sb) nanowire (NW) network as the solid state pH electrode. The sensor is formed combining well known semiconductor processing techniques with a focused ion beam (FIB) based approach inducing the self assembled formation of Sb nanowires in room temperature ambient without using any additional material source
Voltage versus pH curve of the micro scale pH sensor displays the linear characteristics over the investigated pH range from 2 to 10. The slope taken between pH 2 to 10 is 55,9 mV/pH and close to the theoretical limit of 59.15 mV/pH. Upper left inset shows exemplarily the response of the pH 8 solution that exhibits good stability. The lower right inset demonstrates very short response time of about 8s.

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